Features
1) Dimension (W / D / H)
2) APS150: 580mm X 460mm X 700mm
3) APS200: 660mm X 660mm X 700mm
4) Weight (APS150/APS200): 60kg / 80kg
5) Vacuum chuck: 150mm/200mm Stainless steel (Thermal chuck option)
6) chuck theta: 0 ~ 30 degree (fine adjust theta option)
7) Chuck Up / Down: 5mn
8) Microscope stage travel: 25mm X 25mm
9) Microscope Z up for objective changer over (option)
10) Platen movement: fixed (moveable option)
11) Ball Screw Driven Chuck Stage